MICRO-FABRICATION PROCESS FOR AN INTEGRATED BIOSENSOR COMPOSED OF A SPR TRANSDUCER COUPLED TO A MICROCALORIMETRIC SENSOR

Abstract

Integrated biosensors with several types of transducers are complex to manufacture. This paper presents the fabrication process for a bimodal biosensor by using silicon microfabrication process. The device is composed of a surface plasmons resonance (SPR) transducer and a microcalorimetric device. The fabrication process has a yield in our academic foundry. The device was functionalized with a simple BSA-biotin adsorption. SPR sensing performance was assessed by neutravidin binding to immobilized biotins.