CORRUGATED SURFACES FORMED ON GaAs (331)A SUBSTRATES: THE TEMPLATE FOR LATERALLY ORDERED InGaAs NANOWIRES

Author:

MIAO ZHENHUA1,GONG ZHENG1,FANG ZHIDAN1,NIU ZHICHUAN1

Affiliation:

1. National Laboratory for Superlattice and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, P. O. Box 912, Beijing 100083, P. R. China

Abstract

Morphology evolution of high-index (331) A surfaces during molecular beam epitaxy (MBE) growth have been investigated in order to uncover their unique physic properties and fabricate spatially ordered low dimensional nanostructures. Atomic Force Microscope (AFM) measurements have shown that the step height and terrace width of GaAs layers increase monotonically with increasing substrate temperature in conventional MBE. However, this situation is reversed in atomic hydrogen-assisted MBE, indicating that step bunching is partly suppressed. We attribute this to the reduced surface migration length of Ga adatoms with atomic hydrogen. By using the step arrays formed on GaAs (331) A surfaces as the templates, we fabricated laterally ordered InGaAs self-aligned nanowires.

Publisher

World Scientific Pub Co Pte Lt

Subject

Electrical and Electronic Engineering,Computer Science Applications,Condensed Matter Physics,General Materials Science,Bioengineering,Biotechnology

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