RECENT STUDY ON THE RELATED PROBLEMS IN EVALUATION OF MECHANICAL PROPERTIES FOR MEMS MATERIALS-Reference-Cited by-同舟云学术

RECENT STUDY ON THE RELATED PROBLEMS IN EVALUATION OF MECHANICAL PROPERTIES FOR MEMS MATERIALS

Published:2009-12 Issue:04 Volume:01 Page:765-779
ISSN:1758-8251
Container-title:International Journal of Applied Mechanics
language:en
Short-container-title:Int. J. Appl. Mechanics

Author:

JIANG ZHUANGDE¹²,ZHOU XIANGYANG³,ZHU QIANG⁴,ZHAO ZEXIANG⁵,HAIRONG WANG¹,PREWETT PHILIP D.²,JIANG KYLE²

Affiliation:

1. State Key Laboratory for Manufacturing System Engineering, at Xi'an Jiaotong University, No. 28 Xianning West Road, Xi'an, Shaanxi 710049, China

2. School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham, B15 2TT, UK

3. Beijing University of Aeronautics & Astronautics, No. 37 Xueyuan Road, Beijing 100191, China

4. Zhengzhou University, No. 100 Science Road, Zhengzhou, Henan 450001, China

5. Zhongyuan University of Technology, No. 41 Zhongyuan Road, Zhengzhou, Henan 450007, China

Abstract

In order to obtain reliable evaluation result by nanoindentation, the related problems during measurement of the hardness and elastic modulus are investigated. Two quantitative approaches, i.e. calculating actual contact area and correcting contact depth errors, are proposed to deal with the significant pile-up errors for indentation on those ductile soft materials, especially thin soft metal films on hard substrates. The various influence factors during indentation are analyzed, and a new method for uncertainty estimation in hardness and elastic modulus is provided based on the random-fuzzy variables. Through the illustration of Au/glass-ceramic and Al/7059 glass, both the quantitative approaches are suitable for the elastically matching film-substrate systems. The measurement uncertainties in hardness and elastic modulus of Si(100) are effectively estimated, and all possible influencing effects on uncertainty can be involved.

Publisher

World Scientific Pub Co Pte Lt

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.worldscientific.com/doi/pdf/10.1142/S1758825109000332

Reference24 articles.

1. The nanoindentation behaviour of hard and soft films on silicon substrates

2. Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques

3. Analytical study of fundamental nanoindentation test relations for indenters of non-ideal shapes

4. The effect of specimen roughness and indenter tip geometry on the determination accuracy of thin hard coatings stress–strain laws by nanoindentation

5. Investigation of the mechanical properties of thin films by nanoindentation, considering the effects of thickness and different coating–substrate combinations

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling of Temperature-Dependent Hardness for Pure FCC and HCP Metals;International Journal of Applied Mechanics;2020-03

2. Finite Element Analysis to the Constitutive Behavior of Sintered Silver Nanoparticles Under Nanoindentation;International Journal of Applied Mechanics;2018-12

3. Measuring Elastic Properties of the Constituent Multilayer Coatings for Different Modulation Periods;International Journal of Applied Mechanics;2018-05

4. The influence of fractal dimension in the microcontact of three-dimensional elastic-plastic fractal surfaces;The International Journal of Advanced Manufacturing Technology;2018-03-06

5. A New Inverse Analysis Method for Identifying the Elastic Properties of Thin Films Considering Thickness and Substrate Effects Simultaneously;International Journal of Applied Mechanics;2017-10