Thermoelastic Damping of Micromechanical Resonators Based on Quintanilla Theory

Abstract

This paper addresses the exploration of thermoelastic damping (TED) in a microbeam resonator, utilizing the Quintanilla generalized thermoelasticity theory. The study emphasized analyzing the influence of beam height on the microbeam resonators TED and also conducted a thorough assessment of the frequency shift and normalized attenuation in microbeam resonators. These outcomes are then compared with different materials, like silicon (Si) and lead (Pb). The current undertaking demonstrates its utility in tackling challenges associated with science and engineering.