Development of a high-current microbeam system

Author:

Matsuyama S.1,Ishii K.1,Suzuki S.1,Terakawa A.1,Fujiwara M.1,Koshio S.1,Toyama S.1,Ito S.1,Fujisawa M.1,Nagaya T.1

Affiliation:

1. Department of Quantum Science and Energy Engineering, Tohoku University, Aramaki-aza-Aoba 6-6-01-2, Aoba-ku, Sendai 980-8579, Japan

Abstract

We report on the development of a high-current microbeam system for wavelength-dispersive X-ray micro particle-induced X-ray emission (WDX-[Formula: see text]-PIXE) for chemical state mapping. The microbeam system is composed of two slits and a quadrupole doublet lens mounted on a heavy rigid support. The microbeam system is installed immediately after a switching magnet. A beam brightness of [Formula: see text] is obtained at a half-divergence of 0.1 mrad. A beam current of more than 300 pA is obtained for object sizes of [Formula: see text] with a half-divergence of 0.2 mrad, which corresponds to a beam spot size of [Formula: see text]. The calculated spot size of the beam was [Formula: see text] and the measured spot size was [Formula: see text]. The WDX-[Formula: see text]-PIXE system with the microbeam system is now operational.

Publisher

World Scientific Pub Co Pte Lt

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2. Development of a high-voltage stabilization system for precision ion beams;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2023-10

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