ZnS FILM PROPERTIES MODIFICATION USING OBLIQUE ANGLE DEPOSITION TECHNIQUE

Abstract

In this study, zinc sulfide thin films were deposited on glass substrates at room temperature by vacuum thermal evaporation using oblique angle deposition technique. The samples were prepared at different incident vapor flow angles 0∘, 65∘, and 85∘. The samples were studied using various characterization techniques. The film crystallinity was found very sensitive to the growth angle. Atomic force microscope images of the samples were used to investigate their morphology and surface roughness. The images of samples obtained by the field emission scanning electron microscopy technique showed that the produced samples had columnar structures with columns tilting toward the incident vapor flow direction. Optical constants were calculated by using the data obtained from UV–Vis analysis.