Affiliation:
1. IRC in Surface Science, The University of Liverpool, P.O. Box 147, Liverpool L69 3BX, UK
Abstract
The adsorption of chlorine on Si(100) surface has been studied using ESDIAD in conjunction with AES and gas uptake techniques. This work presents an extension of earlier studies of the adsorption of halogen gases at Si(100) which served to initiate our development of ESDIAD technique at the IRC. In the present instance, we report the findings in experiments with high-purity chlorine gas from a bottle, which is distinct from our earlier approach with an electrochemical cell for chlorine gas generation. Two types of adsorbate configurations which transform irreversibly are investigated.
Publisher
World Scientific Pub Co Pte Lt
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
7 articles.
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