ENERGY-FILTERED RHEED AND REELS FOR IN SITU REAL TIME ANALYSIS DURING FILM GROWTH
-
Published:1997-06
Issue:03
Volume:04
Page:525-534
-
ISSN:0218-625X
-
Container-title:Surface Review and Letters
-
language:en
-
Short-container-title:Surf. Rev. Lett.
Author:
ATWATER HARRY A.1,
AHN C. C.1,
WONG S. S.1,
HE G.1,
YOSHINO H.1,
NIKZAD S.1
Affiliation:
1. Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA
Abstract
Energy-filtered reflection high energy electron diffraction and reflection electron energy loss spectroscopy expand the usefulness of reflection high energy electron diffraction for quantitative structure determination and surface spectroscopy during film growth. Several implementations of energy-filtered reflection high energy electron diffraction are discussed, along with the progress and prospects for structure determination. New developments in parallel detection reflection electron energy loss spectroscopy (PREELS) enable the use of this method to obtain surface-spectroscopic information in real time during thin film growth, greatly expanding the range of surface information available during growth.
Publisher
World Scientific Pub Co Pte Lt
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Applications and Future Directions;RHEED Transmission Mode and Pole Figures;2013-12-10
2. In situx-ray photoelectron spectroscopy for thin film synthesis monitoring;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2001-09