EPITAXIAL GROWTH OF TRANSPARENT CONDUCTIVE OXIDES

Author:

OHTA HIROMICHI1,ORITA MASAHIRO1,HIRANO MASAHIRO1,UEDA KAZUSHIGE2,HOSONO HIDEO2

Affiliation:

1. Hosono Transparent Electro Active Materials, ERATO, JST, KSP C-1232, Sakado, Takatsu, Kawasaki 213-0012 , Japan

2. Materials and Structures Laboratory, Tokyo Institute of Technology, Nagastsuta, Midori-ku, Yokohama 226-8503, Japan

Abstract

Transparent conductive oxides of ITO , ZnO , β- Ga 2 O 3, and CuGaO 2 and SrCu 2 O 2 were grown on single crystal substrates of α- Al 2 O 3 and YSZ by pulsed-laser deposition, and their crystallinity was evaluated by using high-resolution X-ray diffraction and electron microscope. Heteroepitaxial growth was observed in spite of relatively large lattice mismatches between film and substrate. A few disordered layers were generated automatically at film/substrate boundary, played buffer layer to suppress propagation of edge dislocations.

Publisher

World Scientific Pub Co Pte Lt

Subject

Condensed Matter Physics,Statistical and Nonlinear Physics

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