OHMIC CONTACTS ON DIAMOND BY R. F. SPUTTERING AND Ti-Au METALLIZATION-Reference-Cited by-同舟云学术

OHMIC CONTACTS ON DIAMOND BY R. F. SPUTTERING AND Ti-Au METALLIZATION

Published:2002-03-20 Issue:06n07 Volume:16 Page:927-931
ISSN:0217-9792
Container-title:International Journal of Modern Physics B
language:en
Short-container-title:Int. J. Mod. Phys. B

Author:

WANG Y. Y.¹,ZHEN C. M.¹,YAN Z. J.¹,GUO Q. F.¹,CHEN G. H.²

Affiliation:

1. Department of Physics, Lanzhou University, Lanzhou 730000, People's Republic of China

2. Material School, Beijing Polytechnic University, 100022, People's Republic of China

Abstract

Low resistance ohmic contacts were fabricated on diamond films. A high boron concentration (~1020 cm -3) was obtained on the surface by ion implantation. The initial film of Ti (20nm) followed by Au (100nm) was deposited by r. f. sputtering. I-V measurements showed that the as-deposited contacts were ohmic. Upon annealing, the ohmic characteristics of the contacts were improved significantly. The specific contacts resistivity decreased from 6.2 × 10-3 to 1.2 × 10-6Ω cm 2 as a result of post-deposition annealing. The X-ray photoelectron spectroscopy analysis indicated the formation of titanium carbide at the Ti/diamond interface in the as-deposited and annealed states. A low oxygen concentration was observed.

Publisher

World Scientific Pub Co Pte Lt

Subject

Condensed Matter Physics,Statistical and Nonlinear Physics

Link

https://www.worldscientific.com/doi/pdf/10.1142/S0217979202010634

Reference8 articles.

1. Field-Effect Transistors using Boron-Doped Diamond Epitaxial Films

2. High-temperature point-contact transistors and Schottky diodes formed on synthetic boron-doped diamond

3. Specific contact resistance measurements of ohmic contacts to semiconducting diamond

4. Evaluation of ohmic contacts formed by B+implantation and Ti‐Au metallization on diamond

5. Correlation of the electrical properties of metal contacts on diamond films with the chemical nature of the metal-diamond interface. I. Gold contacts: A non-carbide-forming metal

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