ERF Based Precision Linear Drive System

Abstract

The design of clutches using electrorheological fluids (ERF) or magnetorheological suspensions (MRS) offers a new approach to precision linear drive systems based on the ‘inch-worm’ principle. This principle needs two clutches or controllable clamps and one (or more) elements to vary the distance between these clamps. To perform a caterpillar-like motion the actuators are controlled in a cyclic mode. This paper presents design elements, system structure and first results of motion performance of a prototype drive system. The presented linear drive combines the high resolution of piezo actuators, the unlimited travel of the ‘inch-worm’ principle and the clutch effect of ERF without a substantial mechanical excitation. The motion of the two clamps is controlled to move a stage in point to point mode or to follow a given velocity profile. Using two piezo actuators the stage can move continuously. Pre-loaded piezo actuators control the distances between the two clamps and the central slide. Each ERF clamp is designed as a set of thin parallel steel plate electrodes which interlock with a set of ground plates. Drive force limits are given by the maximum yield force of the clamps as well as by the relation of the actuator expansion and the ERF/MRS shear stiffness in “solid” mode.