Microstructure-dependent dynamic stability analysis of torsional NEMS scanner in van der Waals regime

Abstract

The physico-mechanical behavior of nanoscale devices might be microstructure dependent. However, the classical continuum theory cannot correctly predict the microstructure dependency. In this paper, the strain gradient theory is employed to examine the instability characteristics of a nanoscanner with circular geometry. The governing equation of the scanner is derived incorporating the Coulomb and van der Waals (vdW) forces. The influences of applied voltage, squeeze damping and microstructure parameters on the dynamic instability of equilibrium points are studied by plotting the phase portrait and bifurcation diagrams. In the presence of the applied voltage, the phase portrait shows the saddle-node bifurcation while for freestanding scanner a subcritical pitchfork bifurcation is observed. It is concluded that the microstructure parameter enhances the torsional stability.