Effect of excitation voltage on bias temperature coefficient of MEMS sandwich accelerometer

Abstract

In MEMS closed-loop accelerometer, excitation voltage is an important design parameter that is related to many performance indexes, and the bias temperature coefficient is a key point for MEMS accelerometer. But the effect of excitation voltage on bias temperature coefficient is not clear and their relation has not yet been established. This paper studies the effect of excitation voltage on bias temperature coefficient of MEMS sandwich accelerometer. The mechanism of their relation is point out, and experiments of bias temperature drift with different excitation voltages are carried out. The measured results show that the excitation voltage influences the bias temperature coefficient of MEMS sandwich accelerometer greatly, and the frame of sensor structure is the main source of bias temperature drift in MEMS sandwich accelerometer. This paper is also helpful for researchers to further understand the source of bias drift in MEMS sandwich accelerometer and make corresponding improvement.