THE APPLICATION FOR PZT THIN FILM IN THE TAPPING MODE SPM CANTILEVER

Abstract

The PZT piezoelectric film was prepared for tapping mode SPM cantilever with four-coupled structure Si , Pt layer + PZT layer + Pt layer + deposition layer. The sample has the length of 200 μm, width of 40 μ m , silicon substrate thickness of 2.0 μ m , the upper and lower electrode thickness of 0.2 μ m . We analyzed the effect of the piezoelectric, sensitivity, frequency etc by changing the structure size of PZT piezoelectric thin film, and we obtained better parameters for structure and performance by the experimental comparison. The results show that: When the force is 10 nN, the thickness of output voltage in the PZT layer is about 2.0 μ m up to maximum, sensitivity is 0.16 mV/nN and the operating frequency is 64.97 kHz. It is convenient to detect and distinguish SPM when deformation displacement rate remained below 500 nm and the output voltage of the device is above 1.0 mV. The device performance is stable and suitable for the SPM system testing requirements.