Contactless Measurement of Thin Film Conductivity by a Microwave Compact Equipment-Reference-Cited by-同舟云学术

Contactless Measurement of Thin Film Conductivity by a Microwave Compact Equipment

Published:2003-04-10 Issue:08n09 Volume:17 Page:1904-1909
ISSN:0217-9792
Container-title:International Journal of Modern Physics B
language:en
Short-container-title:Int. J. Mod. Phys. B

Author:

Ju Yang¹,Hirosawa YO¹,Saka Masumi¹,Abé Hiroyuki²

Affiliation:

1. Department of Mechanical Engineering, Tohoku University, Aoba 01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

2. Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

Abstract

A method for contactless measurement of the conductivity of thin conducting film was demonstrated. In order to apply the technique to on-line testing, a large standoff distance of 35 mm was obtained by using a reflector focusing sensor. The measurement was preformed by using a microwave compact equipment working at 94 GHz which was developed for decreasing the system cost. Indium Tin Oxide films having conductivity of 8.2 × 104 ~ 6.6 × 105 S/m on the glass substrates were used as the samples. Evaluation equation for determining the conductivity of Indium Tin Oxide films was generated.

Publisher

World Scientific Pub Co Pte Lt

Subject

Condensed Matter Physics,Statistical and Nonlinear Physics

Link

https://www.worldscientific.com/doi/pdf/10.1142/S021797920301985X

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