FABRICATION OF UNIFORM ARRAY OF NANO-DOTS AND ITS APPLICATIONS

Abstract

We have developed a novel technique to fabricate extremely uniform arrays of nano-sized dots. Regular arrays of nanometer-sized metallic dots are obtianed by magnetron sputtering deposition through a nanochannel glass replica mask. The platinum replica masks are fabricated using thin film deposition on an etched nanochannel glass and contain hexagonally patterned uniform voids with diameters as small as 50 nanometers. The metallic dot density can be as high as 5×1011 per square centimeter. The magnetic properties of Ni and Co dot arrays have been studied by a Alternating Gradient Magnetometer. The magnetic dot array can be used as pinning centers for superconductors and also can be used as the discrete magnetic media for magnetic recording.