Metrology for Measuring Custom Periodicities on Diffraction Gratings

Abstract

We present a new, inexpensive, bench-top method for measuring groove period over large areas with high mapping resolution and high measurement accuracy, dubbed the grating mapper for accurate period (GMAP). The GMAP has the ability to measure large groove period changes and nonparallel grooves, both of which cannot be measured via optical interferometry. In this paper, we detail the calibration and setup of the GMAP, and employ the instrument to measure three distinct gratings. Two of these measured gratings have customized groove patterns that prevent them from being measured via other traditional methods, such as optical interferometry. Our implementation of this tool achieves a spatial resolution of 0.1[Formula: see text]mm[Formula: see text][Formula: see text][Formula: see text]0.1[Formula: see text]mm and a period error of 1.7[Formula: see text]nm for a 3[Formula: see text][Formula: see text]m size groove period.