MICRO WDX-PIXE SYSTEM AND ITS APPLICATION TO CHEMICAL STATE ANALYSIS

Author:

MOKUNO Y.1,HORINO Y.1,TERASAWA M.2,SEKIOKA T.2,KINOMURA A.1,CHAYAHARA A.1

Affiliation:

1. Osaka National Research Institute, AIST, 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan

2. Himeji Institute of Technology, 2167 Shosya, Himeji, Hyogo 671-2201, Japan

Abstract

Performance of a micro WDX-PIXE system that consists of position sensitive x-ray spectrometer and the heavy ion microbeam line is described. The influence of the position resolution of the position sensitive proportional counter (PSPC) used in the spectrometer on system energy resolution is discussed based on the measured values for C and O K x-rays. The system has successfully been used for chemical state analysis of various compound materials and small area of the materials (< 3 × 10-3 mm 2) can be analyzed.

Publisher

World Scientific Pub Co Pte Lt

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. X-ray Spectrometry;Analytical Chemistry;2002-05-18

2. Chemical state analysis of Cu, Cu2O and CuO with WDX using an ion microbeam;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-07

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