Affiliation:
1. Department of Quantum Science and Energy Engineering, Tohoku University, Aramaki-Aza-Aoba 6-6-01-2, Aoba-ku, Sendai 980-8579, Japan
Abstract
We developed a new microbeam scanning system for efficient local area analyses and also for micro fabrication. The system accomplished a pattern-to-pattern spacing procedure, in which the microbeam was just scanned with a corresponding pattern of the analyzing sample area or of the fabrication form. Between the patterns, the beam was moved with the fastest responsive scanning speed. In order to set patterns of the analyzing sample in the scanning system, an image of the sample was previously obtained with a scanning transmission ion microscopy (STIM). As the result, analyzing time was greatly reduced for the cell sample in which cells are not distributed all over. To demonstrate the scanning system for micro fabrication, such as proton beam writing (PBW). Patterns which were translated from bitmap data including color scale were inscribed on thin films.
Publisher
World Scientific Pub Co Pte Lt
Cited by
1 articles.
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1. Current status of the Tohoku microbeam system at Tohoku University and other facilities;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2023-06