Development of UV-Curable Resins Suitable for Reverse-Tone Lithography for Au Metamaterials Using a Print-and-Imprint Method
Author:
Affiliation:
1. Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577
Publisher
The Chemical Society of Japan
Subject
General Chemistry
Link
http://www.journal.csj.jp/doi/pdf/10.1246/bcsj.20170280
Reference32 articles.
1. Mold-assisted nanolithography: A process for reliable pattern replication
2. Nanoimprint lithography and future patterning for semiconductor devices
3. 32 nm imprint masks using variable shape beam pattern generators
4. Technology review and assessment of nanoimprint lithography for semiconductor and patterned media manufacturing
5. Jet and flash imprint lithography for the fabrication of patterned media drives
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