Formation Process of Aluminium Nitride by the Vapor-phase Reaction of Aluminium Trichloride with Ammonia
Author:
Publisher
The Chemical Society of Japan
Subject
General Chemistry
Link
https://www.jstage.jst.go.jp/article/bcsj1926/57/9/57_9_2673/_pdf
Reference5 articles.
1. Epitaxial growth of aluminum nitride
2. Optical properties of aluminium nitride prepared by chemical and plasmachemical vapour deposition
3. Thermodynamics of AlN deposition by means of the aluminium-trichloride-ammonia process
4. Reaction between Aluminium Trichloride and Oxygen in the Vapor Phase and Properties of the Aluminium Oxide Formed
5. Reaction Process of Zirconium Tetrachloride with Ammonia in the Vapor Phase and Properties of the Zirconium Nitride Formed
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Preparation of aluminium nitride powder from a (hydroxo)(succinato)aluminium(III) complex;Journal of Materials Chemistry;1994
2. Preparation and sintering of aluminum nitride suitable for electronic substrate purposes;Materials Science and Engineering: B;1993-06
3. AlN Powder Synthesis via Nitriding Reaction of Aluminum Sub-Chloride;Materials Transactions, JIM;1993
4. ChemInform Abstract: FORMATION PROCESS OF ALUMINUM NITRIDE BY THE VAPOR-PHASE REACTION OF ALUMINUM TRICHLORIDE WITH AMMONIA;Chemischer Informationsdienst;1985-01-15
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