Synthesis of Silicon Molecular Precursor Chlorosilyl Dichloroboryl Ethane (CSDE) through Experiment Optimization
Author:
Affiliation:
1. Department of Applied Chemistry, School of Science, Northwestern Polytechnical University
Publisher
The Chemical Society of Japan
Subject
General Chemistry
Link
http://www.journal.csj.jp/doi/pdf/10.1246/cl.140868
Reference16 articles.
1. Amorphous Multinary Ceramics in the Si-B-N-C System
2. Die Umwandlung vonN-Methylpolyborosilazan in amorphes Siliciumborcarbonitrid
3. Cl2MeSi–NH–BCl2 and ClMe2Si–NH–BCl2: novel processable single source precursors of amorphous Si/C/B/N ceramics
4. Towards continuous processes for the synthesis of precursors of amorphous Si/B/N/C ceramics
5. Synthesis and characterization of new amorphous Si/B/N/C ceramics with increased carbon content through single-source precursors
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