New method of specimen preparation for high temperature X-ray diffraction, and its applications to some semiconductor wafers.

Author:

KAWAMURA Tsutomu

Publisher

Japan Association of Mineralogical Sciences

Subject

General Earth and Planetary Sciences,General Environmental Science

Reference22 articles.

1. Diffuse Streak Diffraction Pattern of Electron and X-Rays due to Low Frequency Optical Mode in Tetragonal BaTiO3

2. 2) Harper, C. H. (Ed.) (1970) Handbook of Materials and Processes for Electronics, McGraw-Hill, pp. 7–49, 7–50.

3. 3) Hellwege, K.-H (Editor in chief) (1982) Landort-Bornstein (Springer-Verlag), Vol. 22, p. 15.

4. Diffuse Streak Diffraction Patterns from Single Crystals I. General Discussion and Aspects of Electron Diffraction Diffuse Streak Patterns

5. 5) Inoue, Z. and Kurachi, Y. (1983) Structural change of SiC at high temperature – An application of high-temperature X-ray diffractometer to the observation of transformation and thermal expansion. Proc. of Internal. Symp. on Ceramic Components for Engine, Japan. Reidel, pp. 519–528.

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