1. Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
2. Center for Flexible Electronics Technology, Tsinghua University, Beijing 100084, China
3. School of Microelectronics, Soft Membrane Electronic Technology Laboratory, Hefei University of Technology, Hefei 230601, China
4. Zhejiang Lab, Hangzhou 311100, China
5. State Key Laboratory for Manufacturing and Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China
6. Center for X-Mechanics, Zhejiang University, Hangzhou 310027, China