Measurement of geometrical dimensions using scanning electron microscopy
Author:
Publisher
Oxford University Press (OUP)
Subject
Instrumentation
Link
http://academic.oup.com/jmicro/article-pdf/48/4/407/2567980/48-4-407.pdf
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5. A vision-based, 3D reconstruction technique for scanning electron microscopy: Direct comparison with atomic force microscopy;Microscopy Research and Technique;2005
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