Thermal stability of laser-induced modified volumes in Si as studied by in situ and ex situ heating experiments-Reference-Cited by-同舟云学术

Thermal stability of laser-induced modified volumes in Si as studied by in situ and ex situ heating experiments

Published:2018-02-21 Issue:2 Volume:67 Page:112-120
ISSN:2050-5698
Container-title:Microscopy
language:en
Short-container-title:

Author:

Saka Hiroyasu¹,Iwata Hiroyuki¹²,Kawaguchi Daisuke³

Affiliation:

1. Research Institute for Industrial Research, Aichi Institute of Technology, 1247 Yachikusa, Yakusa, Toyota 470-0392, Japan

2. Department of Electric Engineering, Aichi Institute of Technology, 1247 Yachikusa, Yakusa Toyota 470-0392, Japan

3. Research & Development Department, Hamamatsu Photonics KK, 314-5 Shimokanzo, Iwata, Shizuoka 438-0193, Japan

Abstract

Abstract Radiation of a permeable laser beam into Si induces considerable modification of structures. Thermal stability of the laser-induced modified volumes (LIMV’s) was studied comprehensively by means of in situ and ex situ heating experiments using transmission electron microscopy. The behavior in the tail region of a LIMV can be understood by dislocation theory, while that of a void formed at the very focus of a laser beam cannot be understood easily.

Publisher

Oxford University Press (OUP)

Subject

Radiology, Nuclear Medicine and imaging,Instrumentation,Structural Biology

Link

http://academic.oup.com/jmicro/article-pdf/67/2/112/35123198/dfy008.pdf

Reference12 articles.

1. Internal modified-layer formation mechanism into silicon with nanosecond laser;Ohmura;J. Arch. Mater. Manuf. Eng.,2006

2. Crystal structure of laser-induced subsurface modifications in Si;Verburg;Appl. Phys. A,2015

3. Electron microscopy of voids in Si formed by permeable laser irradiation;Iwata;Microscopy,2017

4. On the mobility of partial dislocations in Silicon;Wessel;Phil. Mag.,1977

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