Annular dark-field scanning confocal electron microscopy studied using multislice simulations
Author:
Affiliation:
1. Transmission Electron Microscopy Station, National Institute for Materials Science, Tsukuba, Japan
Publisher
Oxford University Press (OUP)
Subject
Radiology Nuclear Medicine and imaging,Instrumentation,Structural Biology
Link
http://academic.oup.com/jmicro/article-pdf/67/4/232/25406757/dfy023.pdf
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3. Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part II: Inelastic scattering;D’Alfonso;Ultramicroscopy,2008
4. Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy;Frigo;Appl. Phys. Lett.,2002
5. The scanning confocal electron microscope;Zaluzec;Microsc. Today,2003
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