Space charge characteristics of an insulating thin film negatively charged by a low-energy electron beam
Author:
Publisher
Oxford University Press (OUP)
Subject
Radiology, Nuclear Medicine and imaging,Instrumentation,Structural Biology
Link
http://academic.oup.com/jmicro/article-pdf/61/2/85/11761002/dfr099.pdf
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3. EPMA analysis of insulating materials: Monte Carlo simulations and experiments;Ghorbel;J. Phys. D: Appl. Phys.,2005
4. Effects of fast secondary electrons to low-voltage electron beam lithography;Bolorizadeh;J. Micro-Nanolithogr.,2007
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