Development of Electron-Beam Induced Soft X-ray and Vacuum Ultraviolet Emission Spectrometer
Author:
Affiliation:
1. JEOL Ltd. , SA Business Unit, Akishima, Tokyo , Japan
2. JEOL USA Inc. , Peabody, MA , United States
Publisher
Oxford University Press (OUP)
Link
https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.098/58671874/ozae044.098.pdf
Reference5 articles.
1. Development of a sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope
2. Development of soft X-ray emission spectrometer for EPMA/SEM and its application
3. Laminar-type gratings overcoated with carbon-based materials to enhance analytical sensitivity of flat-field emission spectrograph in the VUV region
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