Annealing Induced Diffusion Dynamics in As Ion-Implanted GaAs
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Published:2007-01-01
Issue:1
Volume:E90-C
Page:46-50
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ISSN:0916-8524
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Container-title:IEICE Transactions on Electronics
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language:en
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Short-container-title:IEICE Transactions on Electronics
Author:
SHINOJIMA H.,YANO R.
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials