Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
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Published:2019-01-14
Issue:1
Volume:8
Page:37-48
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ISSN:2194-878X
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Container-title:Journal of Sensors and Sensor Systems
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language:en
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Short-container-title:J. Sens. Sens. Syst.
Author:
Setiono Andi, Fahrbach Michael, Xu Jiushuai, Bertke Maik, Nyang'au Wilson Ombati, Hamdana Gerry, Wasisto Hutomo SuryoORCID, Peiner Erwin
Abstract
Abstract. The asymmetric resonance response in
thermally actuated piezoresistive cantilever sensors causes a need for
optimization, taking parasitic actuation–sensing effects into account. In
this work, two compensation methods based on Wheatstone bridge (WB) input
voltage (VWB_in) adjustment and reference circuit involvement
were developed and investigated to diminish those unwanted coupling
influences. In the first approach, VWB_in was increased,
resulting in a higher current flowing through the WB piezoresistors as well
as a temperature gradient reduction between the thermal actuator (heating
resistor: HR) and the WB, which can consequently minimize the parasitic
coupling. Nevertheless, increasing VWB_in (e.g., from 1 to
3.3 V) may also yield an unwanted increase in power consumption by
more than 10 times. Therefore, a second compensation method was considered:
i.e., a reference electronic circuit is integrated with the cantilever
sensor. Here, an electronic reference circuit was developed, which mimics the
frequency behavior of the parasitic coupling. By subtracting the output of
this circuit from the output of the cantilever, the resonance response can
thus be improved. Both simulated and measured data show optimized amplitude
and phase characteristics around resonant frequencies of 190.17 and
202.32 kHz, respectively. With this phase optimization in place, a
phase-locked-loop (PLL) based system can be used to track the resonant
frequency in real time, even under changing conditions of temperature (T)
and relative humidity (RH), respectively. Finally, it is expected to enhance
the sensitivity of such piezoresistive electro-thermal cantilever sensors
under loading with any target analytes (e.g., particulate matter, gas, and
humidity).
Publisher
Copernicus GmbH
Subject
Electrical and Electronic Engineering,Instrumentation
Reference21 articles.
1. Al horr, Y., Arif, M., Katafygiotou, M., Mazroei, A., Kaushik, A., and Elsarrag, E.: Impact of indoor environmental quality on occupant well-being and comfort: A review of the literature, International Journal of Sustainable Built Environment, 5, 1–11, https://doi.org/10.1016/j.ijsbe.2016.03.006, 2016. 2. Bausells, J.: Piezoresistive cantilevers for nanomechanical sensing, Microelectron. Eng., 145, 9–20, https://doi.org/10.1016/j.mee.2015.02.010, 2015. 3. Bertke, M., Hamdana, G., Wu, W., Marks, M., Wasisto, H. S., and Peiner, E.: Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors, J. Phys.-Conf. Ser., 757, 12006, https://doi.org/10.1088/1742-6596/757/1/012006, 2016. 4. Bertke, M., Hamdana, G., Wu, W., Wasisto, H. S., Uhde, E., and Peiner, E.: Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection, J. Micromech. Microeng., 27, 64001, https://doi.org/10.1088/1361-6439/aa6b0d, 2017a. 5. Bertke, M., Wu, W., Wasisto, H. S., Uhde, E., and Peiner, E.: Size-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoring, in: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, IEEE, 1493–1496, 2017b.
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