Author:
Hoffmann Romy,Schreiter Matthias,Heitmann Johannes
Abstract
Abstract. Carbon dioxide (CO2) is a gas that well represents air quality in indoor environments as well as being an important greenhouse gas. However, the reliable and affordable sensing of environmental CO2 at room temperature, with techniques other than optical spectroscopy, remains an unsolved problem to this day. One major challenge for solid state sensors is the realisation of adequate selectivity, especially towards changing humidity. The thin film bulk acoustic resonator (FBAR) is a MEMS (Microelectromechanical systems) device that can not only detect gas-induced mass changes but also changes in the acoustic velocity and density of its layers. This multi-sensing provides a suitable platform for selective gas sensing. In this work we present studies done on polyaminosiloxane- and ethyl cellulose-functionalised FBARs regarding CO2 sensitivity, selectivity towards humidity, and stability. We demonstrate how CO2 and humidity signals can be separated and that CO2 can be sensed with a resolution of 50 ppm between 400 and 1000 ppm. Using the Mason model, we show how the acoustic velocity and density of an absorption layer can be determined and how changes in those parameters affect the resonance frequency shift. The understanding of these results ultimately presents a tool to theoretically separate any number of gas analytes.
Subject
Electrical and Electronic Engineering,Instrumentation
Reference18 articles.
1. Apte, M. G.: A Review of Demand Control Ventilation, LBNL-60170 Report, Lawrence Berkeley National Laboratory, Berkeley, CA, USA, 2006.
2. Bollini, P., Didas, S. A., and Jones, C. W.: Amine-oxide hybrid materials for acid gas separations, J. Mater. Chem., 21, 15100–15120, https://doi.org/10.1039/C1JM12522B, 2011.
3. Chao, C. Y. H. and Hu, J. S.: Development of a dual-mode demand control ventilation strategy for indoor air quality control and energy saving, Build. Environ., 39, 385–397, https://doi.org/10.1016/j.buildenv.2003.11.001, 2004.
4. Choi, S., Drese, J. H., and Jones, C. W.: Adsorbent materials for carbon dioxide capture from large anthropogenic point sources, ChemSusChem, 2, 796–854, https://doi.org/10.1002/cssc.200900036, 2009.
5. Haeusler, A. and Meyer, J. U.: A novel thick film conductive type CO2 sensor, Sensor. Actuat. B-Chem., 34, 388–395, https://doi.org/10.1016/S0925-4005(96)01847-3, 1996.
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