High-temperature behavior of housed piezoelectric resonators based on CTGS

Author:

Schulz Michal,Ghanavati Rezvan,Kohler Fabian,Wilde Jürgen,Fritze Holger

Abstract

Abstract. A temperature sensor based on piezoelectric single crystals allowing stable operation in harsh environments such as extreme temperatures and highly reducing or oxidizing atmospheres is presented. The temperature dependence of the mechanical stiffness of thickness shear mode resonators is used to determine temperature changes. The sensor is based on catangasite (Ca3TaGa3Si2O14 – CTGS), a member of a langasite crystal family. CTGS exhibits an ordered crystal structure and low acoustic losses, even at 1000 ∘C. The resonance frequency and quality factor of unhoused and of housed CTGS resonators are measured up to about 1030 ∘C. A temperature coefficient of the resonance frequency of about 200 Hz K−1 for a 5 MHz device is found and enables determination of temperature changes as small as 0.04 K. Housed CTGS resonators do not show any significant change in the resonance behavior during a 30 d, long-term test at 711 ∘C.

Publisher

Copernicus GmbH

Subject

Electrical and Electronic Engineering,Instrumentation

Reference21 articles.

1. Bruckner, G., Hauser, R., Stelzer, A., Maurer, L., Reindl, L., Teichmann, R., and Biniasch, J.: High temperature stable SAW based tagging system for identifying a pressure sensor, IEEE International Frequency COntrol Symposion and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 4-8 May 2003, Tampa, FL, USA, 942–947, 2003. a

2. CRYSTRAN: Sapphire IR  Transmission data table, Crystran Ltd. [data set], available at: https://www.crystran.co.uk/optical-materials/sapphire-al2o3 (last access: 2 June 2021), 2019. a

3. Edler, F.: Precise temperature measurement above 1000 ∘C using thermocouples, Proc. Estonian Acad. Sci. Eng., 13, 310–319, 2007. a

4. Fachberger, R., Bruckner, G., Knoll, G., Hauser, R., Biniasch J., and Reindl, L.: Applicability of LiNbO3, langasite and GaPO4 in high temperature SAW sensors operating at radio frequencies, in: IEEE T. Ultrason. Ferroelect. Freq. Control, 51, 1427–1431, 2004. a

5. Fritze, H.: High-temperature bulk acoustic wave sensors, Meas. Sci. Technol., 22, 012002, https://doi.org/10.1088/0957-0233/22/1/012002, 2011. a, b, c, d, e

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Effect of Isothermal Annealing on the Optical Properties of Ca3TaGa3Si2O14 Crystals;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2024-02

2. Effect of isothermal annealing on the optical properties of Ca<sub>3</sub>TaGa<sub>3</sub>Si<sub>2</sub>O<sub>14</sub> crystals;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2024-01-15

3. Influence analysis of the packaging technology for piezoelectric sensors operating up to 1000 °C;2022 IEEE 24th Electronics Packaging Technology Conference (EPTC);2022-12-07

4. Electromechanical properties of housed piezoelectric CTGS resonators at high temperatures – Modeling of housing influence;tm - Technisches Messen;2022-06-29

5. Assembly and interconnection technology for high-temperature bulk acoustic wave resonators;Journal of Sensors and Sensor Systems;2022-03-23

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3