Metal oxide semiconductor gas sensor self-test using Fourier-based impedance spectroscopy

Abstract

Abstract. For the self-test of semiconductor gas sensors, we combine two multi-signal processes: temperature-cycled operation (TCO) and electrical impedance spectroscopy (EIS). This combination allows one to discriminate between irreversible changes of the sensor, i.e., changes caused by poisoning, as well as changes in the gas atmosphere. To integrate EIS and TCO, impedance spectra should be acquired in a very short time period, in which the sensor can be considered time invariant, i.e., milliseconds or less. For this purpose we developed a Fourier-based high-speed, low-cost impedance spectroscope. It provides a binary excitation signal through an FPGA (field programable gate array), which also acquires the data. To determine impedance spectra, it uses the ETFE (empirical transfer function estimate) method, which calculates the impedance by evaluating the Fourier transformations of current and voltage. With this approach an impedance spectrum over the range from 61 kHz to 100 MHz is acquired in ca. 16 μs. We carried out TCO–EIS measurements with this spectroscope and a commercial impedance analyzer (Agilent 4294A), with a temperature cycle consisting of six equidistant temperature steps between 200 and 450 °C, with lengths of 30 s (200 °C) and 18 s (all others). Discrimination of carbon monoxide (CO) and methane (CH4) is possible by LDA (linear discriminant analysis) using either TCO or EIS data, thus enabling a validation of results by comparison of both methods.