LTO - SiO2 DEPOSITION IN A STAGNATION FLOW LPCVD SYSTEM
Author:
Publisher
EDP Sciences
Subject
General Engineering
Link
http://jphyscol.journaldephysique.org/10.1051/jphyscol:1989549/pdf
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Structure and phase behavior of a disk-necklace polymer: Cyclolinear polymethylsiloxane;Polymer;2007-07
2. Dynamic mechanical properties of extruded rods of poly(dimethylsilylene-co-methyl-n-propylsilylene);Journal of Polymer Science Part B: Polymer Physics;2000-03-01
3. Rapid photochemical deposition of silicon dioxide films using an excimer lamp;Journal of Applied Physics;1994-10
4. Low pressure chemical vapor deposition of oxide from SiH4/O2: Chemistry and effects on electrical properties;Applied Physics Letters;1992-01-13
5. Hexagonal columnar mesophases from phthalocyanine Upright and tilted intracolumnar molecular stacking, herringbone and rotationally disordered columnar packing;Liquid Crystals;1991-03
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