Nanoscale surface characterization using laser interference microscopy
Author:
Publisher
EDP Sciences
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,General Materials Science
Link
https://www.mechanics-industry.org/10.1051/meca/2017058/pdf
Reference29 articles.
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2. Kaiser F., Vergyris P., et al., Quantum white-light interferometry for high-accuracy optical parameter determination, Quantum Inf. Meas. (QIM) QT6A.11 (2017)
3. Phase shifting interferometry from two normalized interferograms with random tilt phase-shift
4. Dual-wavelength interferometry based on the spatial carrier-frequency phase-shifting method
5. Steps length error detector algorithm in phase-shifting interferometry using Radon transform as a profile measurement
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