The development of MOCVD techniques for ferroelectric and dielectric thin film depositions
Author:
Publisher
EDP Sciences
Subject
General Physics and Astronomy
Link
http://jp4.journaldephysique.org/10.1051/jp4:20013143/pdf
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. MOCVD growth of barium–strontium titanate films using newly developed barium and strontium precursors;Thin Solid Films;2010-06
2. Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium-Strontium-Titanate Films;Chemical Vapor Deposition;2009-12
3. Barium acylpyrazolonate derivatives stabilized by O- and N-donor ligands: synthesis, spectral and structural characterization;Inorganica Chimica Acta;2005-03
4. Key Integration Techniques and Issues for Silicon-Based Ferroelectric Devices;Integrated Ferroelectrics;2004-01
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