1. National Technology Roadmap for Semiconductors, SemiconductorIndustry Association, 4300 Steven's Creek boulevard, Suite 271, San Jose, CA., November, 2001
2. H. C. van de Hulst,Light Scattering by Small Particles(Dover Publications Inc, New York, 1981) 1cm
3. Chi Au, T. Messina, R. K Goodall, H. R Huff, inSemiconductor Silicon 1998, edited by H. R. Huff et al. (The Electrochem. Soc. Proceedings Series, Pennington NJ, 1998), p. 641
4. K. Kugimmia., S. Hahn, M. Yamashita, P. R Baustein, K. Takahashi, inSemiconductor Silicon 1990, edited by H. R. Huff et al. (The Electrochem. Soc. Proceedings Series, Pennington NJ, 1990), p. 1052