Optical and microwave characteristics of ambient temperature deposited zirconium tin titanate high-kfilms
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://www.epjap.org/10.1051/epjap:2008151/pdf
Reference17 articles.
1. Existence range, structural and dielectric properties of ZrxTiySnzO4 ceramics (x+y+z=2)
2. Electrical properties of (Zr,Sn)TiO4dielectric thin film prepared by pulsed laser deposition
3. Optical and dielectric properties of highly oriented (Zr0.8,Sn0.2)TiO4 thin films prepared by rf magnetron sputtering
4. Deposition and characterization of zirconium tin titanate thin films as a potential high-k material for electronic devices
5. Ambient temperature growth of nanocrystalline titanium dioxide thin films
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1. Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films;Materials Research Express;2018-03-16
2. Structural, optical, dielectric and electrical studies on RF sputtered nanocrystalline Zr doped MgTiO3 thin films;Journal of Alloys and Compounds;2015-01
3. Effect of post annealing on structural, optical and dielectric properties of MgTiO3 thin films deposited by RF magnetron sputtering;Applied Surface Science;2013-01
4. Preparation and Characterization of ZST Films for CMOS Applications;Integrated Ferroelectrics;2010-11-11
5. Dielectric properties of ambient temperature grown nanocrystalline ZrTiO4 thin films using DC magnetron sputtering;Materials Science and Engineering: B;2010-04
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