Plasma etching of organic material: Combined effects of charged and neutral species
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://epjap.epj.org/10.1051/epjap:2007031/pdf
Reference27 articles.
1. C. Aenlle, International Herald Tribune (12/19/1991)
2. H.K. Yasuda,Plasma polymerisation(Academic Press, New York, 1985)
3. Plasma etching of polymers: A reinvestigation of temperature effects
4. Design criteria for uniform reaction rates in an oxygen plasma
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