Deposition of optical coatings with real time control by the spectroellipsometry
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://www.epjap.org/10.1051/epjap:2004191/pdf
Reference21 articles.
1. Process monitoring of semiconductor thin films and interfaces by spectroellipsometry
2. Real-time control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model
3. Direct numerical inversion method for kinetic ellipsometric data I Presentation of the method and numerical evaluation
4. Direct numerical inversion method for kinetic ellipsometric data II Implementation and experimental verification
5. In situ spectral ellipsometry for real‐time thickness measurement: Etching multilayer stacks
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1. Exact polynomial inversion for top transparent layer parameters on an arbitrary substrate in ellipsometry;Journal of Physics: Condensed Matter;2008-06-24
2. Multilayer optical filters control by multi-channel kinetic ellipsometry;physica status solidi (c);2008-05
3. Deposition of Ge-doped silica thin films for an integrated optic application using a matrix distributed electron cyclotron resonance PECVD reactor;Optical Materials;2007-10
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