Structural analysis of hydrogenated nanocrystalline silicon thin films as a function of substrate temperature during deposition
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://www.epjap.org/10.1051/epjap/2013130394/pdf
Reference39 articles.
1. High mobility nanocrystalline silicon transistors on clear plastic substrates
2. PECVD-based nanocrystalline-silicon TFT backplanes for large-sized AMOLED displays
3. Fabrication of thin film nanocrystalline silicon solar cell with low light-induced degradation
4. Nanocrystalline silicon based thin film solar cells
5. Suppression of photo-leakage current in amorphous silicon thin-film transistors by n-doped nanocrystalline silicon
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. On correlation between visible−near-infrared transmittance spectra and structural properties of plasma deposited nanocrystalline silicon thin films;AIP Conference Proceedings;2016
2. Effect of RF power density on micro- and macro-structural properties of PECVD grown hydrogenated nanocrystalline silicon thin films;AIP Conference Proceedings;2016
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