Comparison of Bi2O3-targets produced by thermal evaporation and RF magnetron sputtering

Abstract

For the nuclear chemistry and for the nuclear physics of the heavy elements, bismuth is one of the key target materials, as it is the heaviest stable element. As discussed earlier, compound targets were developed to withstand higher intensive heavy ion beams. In the past, Bi2O3 was evaporated from the tantalum crucible and deposited on carbon backings. As the melting temperature of Bi2O3 is high (817° C), the process is at the limit of the cooling features of the evaporation set-up. Therefore, we decided to test RF magnetron sputtering as an alternative production method. We will present results of the different behavior of the targets produced via alternative processes.