Abstract
Photoemission has always played an important role in the development of new microelectronic devices and processes and has quickly focused on the use of monochromatized Al Kd radiation in most commercial instruments. While, for instance, ARXPS using sample tilting or the use of high-energy photoemission at synchrotron facilities were available, their use remained confidential due to technical constraints such as measurement time, repeatability of the measurements and/or access to the facilities. In this paper, we show through some examples that the implementation of these features in a user-friendly setup in the laboratory considerably enhances the information retrieved from photoemission experiments.
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