Author:
Ceneda Daniele,Centini Marco,Dereshgi Sina Abedini,Aydin Koray,Larciprete Maria Cristina
Abstract
We performed infrared optical characterization of polycrystalline β-Ga2O3 films, in the 10-18 μm range, deposited by metal organic chemical vapor deposition on sapphire substrates. Our results show that it is possible to obtain a dominant β-phase film, with a well-defined, normal to surface z-axis orientation. These results are confirmed by reflection spectra performed at 45° incidence angle which reveals a z-phonon Reststrahlen band as a function of the incident field linear polarization.