Author:
Benisch Michael F.,Faehnle Oliver,Rascher Rolf
Abstract
In previous publications the inhomogeneous pressure transfer through the polishing tool onto a glass surface could be shown. This experiment shows polishing trials with different polishing materials and the differences in the homogeneity of the pressure transfer through them. Only the properties of the material will be discussed explicitly, the change of the tool constitution through the process will be part of further publications.