Abstract
It is shown experimentally that a microplasma created by a microstructured electrode array is sensitive to sound pressure. In this paper, two electrode architectures are used to create the microplasma. The sensitivity of these microplasma microphones, close to 0.4 nA/Pa, is estimated using a waveguide and a calibration method by comparison with a reference microphone. An empirical expression of the acoustic pressure sensitivity of microdischarges is proposed. The predictions of this empirical model are in good agreement with the experimental data.
Funder
Conseil Régional des Pays de la Loire