Author:
Kempson V. C.,Jorden A. R.,Crosland N. C. E.,Wilson M. N.,Schouten J. C.,Townsend M. C.,Anderson R. J.
Subject
General Physics and Astronomy,General Engineering
Reference6 articles.
1. Kempson V. C.et al ,≪ Helios 1 - transportation and reinstallation at Ibm's East Fishkill facility ≫, Proc. 4th Microprocess. Conference, Kanazawa, Japan, July 1991, paper B-9-4.
2. Andrews D. E., Archie C. N., The Helios compact synchrotron X-ray source : one year of operation at Alf, to be published inSpie, Proc. Electron-Beam. X-ray and Ion Beam Submicrometer Lithographies for Manufacturing Iii, San José, Usa, March 1993.