Soft X-ray reflectometry applied to the evaluation of surface roughness variation during the deposition of thin films
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Published:1988
Issue:10
Volume:23
Page:1645-1652
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ISSN:0035-1687
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Container-title:Revue de Physique Appliquée
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language:
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Short-container-title:Rev. Phys. Appl. (Paris)
Cited by
27 articles.
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