Study on a New Method for Improving Resolution of Grating Interferometer Displacement Measuring System
Author:
Publisher
EDP Sciences
Subject
General Medicine
Link
http://www.matec-conferences.org/10.1051/matecconf/20164202001/pdf
Reference11 articles.
1. Analysis of tolerances in a grating interferometer for high-resolution displacement measurement
2. Error transfer function for grating interferometer
3. Laser nanointerferometry of displacement: methods and means of measurement accuracy improvements
4. High-precision positioning stages for micro- and nanolithography
5. Yoshioka H, Kuroyama S, Sawano H and Shinno H. Sub-nanometer positioning with a high resolution laser interferometer [C],Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, Vol 1, 2010, 404–407
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